Wafer Charging Monitors, Inc.

Application Examples & Tutorial

Using CHARM®-2
To Quantify Wafer Charging
in Ion and Plasma-Based
Processing Equipment

Download the complete text and figures in Adobe PDF format and use Acrobat Reader version 3.0 or higher to view and/or print.

These tutorials are a good way to learn how to predict wafer charging damage in etchers, ashers, implanters, and plasma deposition equipment.
For viewing, we recommend you set your monitor to 256 or more colors and use Acrobat Reader version 3.0 or higher. (If you do not have Adobe® Acrobat® Reader version 3.0 or higher, you can download a free copy of the latest version using the link provided near the bottom of this page.)
For printing, we strongly recommend you use a color printer. (The wafer maps may not come out as clear and readable in black-and-white as they do in color.)

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(0.5 MB) Tutorial (Short Version)

(1.4 MB) Application Examples & Tutorial

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