WCM   Wafer Charging Monitors, Inc.

The Wafer Charging Bulletin

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(349 KB) Vol. 7, No. 1 (Fall 2004)
  Feature Article:  How to avoid charging damage in IC manufacturing . . .
  ·  Oxide deposition
  ·  Effect of UV and charging on non-volatile ICs
  ·  Etching plasmas -- "electron shading" effect
  ·  Effect of substrate antennas
  ·  Ion implantation
  ·  Charging monitor requirements
  ·  Proper use of charging and damage monitors

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